University of Maryland Institute for Research in Electronics and Applied Physics
Institute for Research in Electronics and Applied Physics

Laboratory for Plasma Processing of Materials

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The Laboratory for Plasma Processing of Materials in the Energy Research Facility features an array of state-of-the-art tools for plasma-based etching, synthesis or modification of materials. The tool set available in the laboratory includes plasma reactors, instruments that characterize the plasma or the surfaces of plasma-treated materials, and measurement tools that evaluate the crucial variables that determine the ultimate usefulness of the materials and structures thus produced. The available plasma reactors include devices for producing either highly ionized plasmas (fraction of charged particles in the percentage range) or reactors where the charged particle density is negligible but reactive atoms or molecular radicals formed in a remote plasma chamber interact with the material to be modified. A great deal of the work in the laboratory is aimed at establishing the plasma processing science required for optimal plasma approaches to advanced materials processing and articulating models that may be used to predict the performance of important plasma processes.

The images shown below provide views of researchers in the plasma processing laboratory at work.

Dr. Xi Li is working on a multi-
chamber vacuum system used for
plasma processing of materials. A
ultra-high vacuum sample transfer
system connects various plasma
devices with a multi-technique
surface analysis system and with
each other.

This image shows graduate student Li Ling
performing a plasma process in an inductively
coupled plasma processing tool featuring
numerous in-situ diagnostic techniques.

Graduate student Xuefeng Hua and
visitor Masanaga Fukasawa (SONY
Corp.) perform surface analysis of
plasma-processed material.

Graduate student Sebastian Engelmann discusses research results that he has obtained on an NSF-supported project (DMR-0406120) with undergraduate students Brian Smith and Michael Figueroa -- all are students of Materials Science and Engineering, University of Maryland, College Park. Brian Smith and Michael Figuero began participating in the NSF-funded research in 2005 and plan to actively contribute to the research on this topic during the final two years of their undergraduate program.

For further information, please contact Dr. Gottlieb Oehrlein.

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