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Laboratory for Plasma Processing of Materials

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Principal Investigator:  Professor Gottlieb Oehrlein

The Laboratory for Plasma Processing of Materials in the Energy Research Facility is focused on developing the science of low temperature plasma (LTP) – materials interactions that is required in many applications. The laboratory features an array of state-of-the-art tools for plasma-based etching, synthesis or modification of materials. Applications range from atomic scale processing of materials related to information technology using plasma sources at low pressure to exploratory applications involving plasma-surface treatments of polymers, biomolecules and foods to plasma-catalysis using LTP sources operating at atmospheric pressure.

The most recent images are shown near the top (2018), whereas the images near the bottom are historical.  For a larger copy of an image, right click on the image, then press "view image".

For further information, please contact Dr. Gottlieb Oehrlein.

Dr. Godyak teaching graduate students
Dr. V. Godyak teaching graduate students how to report their data for maximum impact in the scientific literature. From left to right: Kang-Yi Lin, Eike Beyer, Adam Pranda, Dr. Godyak, Chen Li, Yudong Li, Pingshan Luan (PhD, 2018).
Effluent of a non-equilibrium plasma jet operated in ambient air
Photograph of the effluent of a non-equilibrium plasma jet operated in ambient air.
Adam pranda and Kang-Yi Lin working on vacuum transfer of a specimen
Graduate students Adam Pranda and Kang-Yi Lin working on vacuum transfer of a specimen into a UHV chamber for surface characterization after atomic layer etching.
Chen Li working with a novel plasma reactor that he constructed
Graduate student Chen Li working with a novel plasma reactor that he constructed featuring electron beam-induced plasma generation and real-time in-situ surface analysis for atomic scale processing of materials.
Chen Li with electron beam
Chen Li with electron beam.
Pingshan Luan working on x-ray photoemission spectroscopy
Dr. Pingshan Luan (Ph.D. 2018) working on x-ray photoemission spectroscopy characterization of polymer sample after plasma treatment using atmospheric pressure plasma source.
Dr. Shiqiang Zhang working with an atmospheric pressure plasma jet
Dr. Shiqiang Zhang working with an atmospheric pressure plasma jet located inside the controlled environment of a vacuum chamber. Real-time in-situ surface characterization of materials being treated by atmospheric pressure plasma jet can be performed, along with various type of characterizations of the effluent.
Fourier transform infrared spectrometer
Fourier transform infrared spectrometer used for gas phase and surface characterization of plasma-catalyst processes for sustainable environmentally acceptable processes using atmospheric pressure plasma devices.
View of vacuum cluster
View of vacuum cluster showing multi-technique surface analysis system at left and various plasma processing chambers behind and at right. Various custom-built UHV-compatible chambers are used for plasma processing and incorporate various capabilities, including integrated real-time plasma/gas phase and surface diagnostics. They are connected via UHV transfer with a sample preparation chamber and a multi-technique surface analysis system.
  Drs. V. Godyak, Dominik Metzler, and Nick Fox-Lyon
Drs. V. Godyak, Dominik Metzler (PhD, 2016), and Nick Fox-Lyon (PhD, 2013) discussing plasma-characterization using Langmuir probe.