Small Sci. 3, 2300098 (2023)https://ireap.umd.edu/10.1002/smsc.2023000982023
Cosmin-Constantin Popescu ... Carlos A. Rios Ocampo
Journal ArticleAdvanced Materials and Nanotechnology

Owing to their unique tunable optical properties, chalcogenide phase change materials are increasingly being investigated for optics and photonics applications. However, in situ characterization of their phase transition characteristics is a capability that remains inaccessible to many researchers. Herein, a multifunctional silicon microheater platform capable of in situ measurement of structural, kinetic, optical, and thermal properties of these materials is introduced. The platform can be fabricated leveraging industry-standard silicon foundry manufacturing processes. This platform is fully open-sourced, including complete hardware design and associated software codes.


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