Impact of Hydrofluorocarbon Molecular Structure Parameters on Plasma Etching of Ultra-Low-K Dielectric

Fluorocarbon Based Atomic Layer Etching of Si3N4 and Etching Selectivity of SiO2 over Si3N4

Cold Atmospheric Pressure Plasma VUV Interactions with Surfaces: Effect of Local Gas Environment and Source Design

Effect of the Chamber Wall on Fluorocarbon-Assisted Atomic Layer Etching of SiO2 Using Cyclic Ar/C4F8 Plasma

Negating Interfacial Impedance in Garnet-Based Solid-State Li Metal Batteries

Demonstration of Resonance Coupling in Scalable Dielectric Microresonator Coatings for Photovoltaics

Noble Metal Alloys for Plasmonics

Interconnected Mesoporous V2O5 Electrode: Impact on Lithium Ion Insertion Rate

A Rechargeable A1/S Battery with an Ionic-Liquid Electrolyte

On the Interaction of Cold Atmospheric Pressure Plasma with Surfaces of Biomolecules and Model Polymers